Sevenstar Mass Flow Controller CS300 MFC

Name: Sevenstar Mass Flow Controller CS300 MFC - flowmeterbusiness
SKU: Z10653

Features:

Enhanced Accuracy and Rapid Response
The CS300 MFC achieves improved accuracy with a to……

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SKU: Z10653 Category: Bronkhorst Mass Flow Controller

Features:

Enhanced Accuracy and Rapid Response
The CS300 MFC achieves improved accuracy with a tolerance of ±0.8% of S.P., and the latest models boast a response time of less than 0.5 seconds.
Low Zero Drift and Temperature Coefficient
Utilizing innovative sensor technology, the CS230 MFC maintains stability and withstands temperature fluctuations. With no auto-zero amplifier, it exhibits minimal zero drift of less than 0.6% F.S./year and a temperature coefficient of less than 0.02% F.S./℃ (zero) and 0.05% F.S./℃ (span).
Metal-Sealed Models and High Purity Feature
The CS300 incorporates a special metal surface process and utilizes 316 stainless steel VV with a roughness of less than 5 RA, meeting the requirements of semiconductor standards.
Compatible Interfaces
The CS300 MFC supports various interfaces that can be selected by the customer, including ±8V to ±16V dual-end power supply or +14V to +28V single-end power supply, digital or analog signal input and output, SEMI standard mechanical dimensions, and RS-485 or DeviceNetTM communications module.
Additional Functions
Each model of the CS300 MFC includes powerful customer software as standard, with optional features such as multi-gas and multi-range support, auto-zero capability, alarms, soft start, and delay.
CS300 MFCs support 1.125″, 1.5″ W, C IGS flange sizes.

Specification

CS300
Type	CS310C			CS320C		CS310D		CS320D
Valve Type	Normally Open	Normally Closed	N/A	Normally Closed or Normally Open	N/A	Normally Closed or Normally Open	N/A	Normally Closed or Normally Open	N/A
Full scale range (N₂)	(0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
Accuracy
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤?0.8sec????????????（≤?0.5sec??optional）
Differential Pressure	0.05~0.3MPa Flow≤5SLM 0.1~0.3MPa 5SLM<Flow≤10SLM 0.2~0.3MPa Flow>10SLM	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa ?Flow＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa ?Flow＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa ?Flow＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa ?Flow＞10SLM	＜0.02 MPa
Temperature? Coefficient	Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃
Max Pressure	3.5 MPa	1 MPa	3.5 MPa	3.5 MPa
Leak integrity	1×10^-11?Pa·m³?/ sec He
Seal Materials	Metal
maximum operating pressure	0.45MPa
Operation Temperature	（0～50）℃
Input Signal	Digital: RS485 or DeviceNet^TM?or?EtherCAT Analog:(0～5)VDC		N/A	Digital: RS485 or DeviceNet^TM?or?EtherCAT Analog:(0～5)VDC	N/A	Digital: RS485 or DeviceNet^TM?or?EtherCAT Analog:(0～5)VDC	N/A	Digital: RS485 or DeviceNet^TM?or?EtherCAT Analog:(0～5)VDC	N/A
Output Signal	Digital: RS485 or DeviceNet^TM?or?EtherCAT Analog:(0～5)VDC
Zero Drift	＜0.6%F.S. per year without autozero
Power Supply	±8～±16 VDC (bipolar)?或 +14～+28 VDC (unipolar)
Surface Chemistry	Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms					–
Surface Finish	Ra ?5μinch
Fittings	VCR1/4” M 1.125″C Type 1.125″W Type			1.5″B 1.5″C 1.5″W		VCR1/4” M 1.125″C Type 1.125″W Type		1.5″B 1.5″C 1.5″W
Electronic Connector	9 pin male sub-D ，15 pin male sub-D ，DeviceNet^TM?male，EtherCAT
Weight	1 Kg		0.8Kg	1.2Kg	1Kg	1 Kg	0.8Kg	1.2Kg	1Kg