Sevenstar Mass Flow Controller CS100 MFCs

Name: Sevenstar Mass Flow Controller CS100 MFCs - flowmeterbusiness
SKU: Z10658

CS100 MFCs derive from the CS series, sharing the same technologies, Constant-power Sensor, Digital Sensor Balance and Valve Correct Pedestal Technology. CS100 can be customized to specific requirements. Additionally with Customer Ground Correction (CGC) function CS100 is flexible in different operating environments and eliminate the bad influence to accuracy because of the improper connecting of ground wires.

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SKU: Z10658 Category: Bronkhorst Mass Flow Controller

Features:

Enhanced Accuracy and Fast Response
The CS100 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and it boasts a fast response time of less than 1 second.
Additional Functions
Each model of the CS100 MFC includes powerful customer software as standard, and customers can choose from a range of additional functions to suit their specific needs. These features include support for multi-gas and multi-range applications, auto-zero capability, alarms, soft start, and delay.
Customization
The CS100 MFC provides customization options to meet individual requirements. It can be tailored to support ±15V double-end or +24V single-end power supply. Customers can select the interface that best suits their needs, such as RS485, and choose between digital or analog input and output. The MFC can also be customized with either a metal seal or elastomer seal, and it offers the flexibility to adhere to SEMI standard or compact mechanical dimensions.

Specification

CS100
Type	CS100A
Valve Rest Position	Normally Closed				No Valve
Full scale range (N₂)	(0～10,20,30,50,100,200,300,500) ?SCCM (0～1,2,3,5,10,20,30,50) ???????SLM
Accuracy	±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 1sec
Differential Pressure	0.05～0.35MPa； FLOW≤10 SLM 0.1～0.35MPa ； 10＜FLOW≤30 SLM 0.25～0.45MPa ； 30＜FLOW≤50 SLM				＜0.02 MPa
Temperature Coefficient	Zero: ≤±0.05% F.S/℃； ??Span: ≤±0.1% F.S/℃
Max Pressure	3MPa				10MPa
Leak integrity	1×10^-9?Pa·m³?/ sec He（1×10^-8?atm·cc / sec He）
Wetted Materials	Viton
maximum operating pressure	0.45MPa
Operation Temperature	（5～45）℃
Input Signal	Analog: (0～5)VDC		Digital: RS485		N/A		N/A
Output Signal	Analog: (0～5)VDC		Digital: RS485		Analog: ?????????(0～5)VDC		Digital: RS485
Electronic Connector	9 pin male sub-D； 15 pin male sub-D	9 pin male sub-D； 3 pin male O		15 pin?male sub-D	9 pin male sub-D； 15 pin male sub-D	9 pin?male?sub-D； 3 pin?male O		15 pin male sub-D
Power Supply	±15V	±15V		+24V	±15V	15V		+24V
ATUO ZERO	SUPPORT
Surface Finish	25μinch Ra
Fittings	Compression Fittingφ6； Compression Fittingφ3； Compression Fitting1/4??；Compression Fitting1/8??； VCR1/4″male； Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;
Weight	1.2Kg				1Kg

Specification

CS100
Type	CS100D
Valve Rest Position	Normally Closed				No Valve
Full scale range (N2)	(0～10,20,30,50,100,200,300,500) ?SCCM (0～1,2,3,5,10,20,30) ??????????SLM
Accuracy	±1.0% S.P. (≥35% F.S.)；?±0.35% F.S.(＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 1sec
Differential Pressure	0.05～0.35MPa；FLOW≤10?SLM 0.1～0.35MPa；10＜FLOW≤30?SLM				＜0.02 MPa
Temperature Coefficient	Zero: ≤±0.05% F.S/℃；???Span: ≤±0.1% F.S/℃
Max Pressure	3MPa				10MPa
Leak integrity	1×10-9?Pa·m3?/ sec He（1×10-8?atm·cc / sec He）
Wetted?Materials	Metal
maximum operating pressure	0.45MPa
Operation Temperature	（5～45）℃
Input Signal	Analog: (0～5)VDC		Digital:?RS485		N/A		N/A
Output Signal	Analog: (0～5)VDC		Digital:?RS485		Analog: (0～5)VDC		Digital:?RS485
Electronic Connector	9 pin male sub-D； 15?pin male sub-D	9 pin male sub-D； 3 pin?male O		15?pin male sub-D	9 pin male sub-D； 15?pin male sub-D	9 pin?male?sub-D； 3 pin male O		15?pin?male sub-D
Power Supply	±15V	±15V		+24V	±15V	±15V		+24V
ATUO ZERO	SUPPORT
Surface Finish	25μinch Ra
Fittings	VCR1/4″male
Weight	1.2Kg				1Kg