High Performance Pressure-insensitive, Multi-gas, Multi-range 5 sccm to 50 slm Mass Flow Controllers

The P9B mass flow controller is a versatile device designed to handle various process gases and flow ranges. It offers sub-750 millisecond control times and maintains accuracy within 1% of the set point. The controller is capable of accommodating a wide range of gases, from light gases like helium to heavy gases such as SF6. With flow rates ranging from 5 to 50,000 standard cubic centimeters per minute (sccm), it effectively minimizes the need for extensive MFC inventory.

Key Features of the P9B Mass Flow Controller:

• Flow rates ranging from 5 to 50,000 sccm
• Pressure insensitivity with an integrated pressure sensor
• Multi-gas/multi-range functionality with 1% accuracy of the set point
• Analog input/output: 0 to 5 VDC
• Digital input/output options: DeviceNet, EtherCAT