Multi-gas, Multi-range, Metal-sealed, 5-50,000 sccm Mass Flow Controller

The GM50A and GM51A are digitally-controlled mass flow controllers designed for precise flow control in various applications. They offer analog or RS485, Profibus?, EtherCAT?, PROFINET, or DeviceNet? I/O options. The digital control electronics incorporate the latest MKS control algorithms, ensuring fast and repeatable response to set points across the device control range. Typical response times for these controllers are approximately 500 milliseconds. Digital calibration provides 1% of set point accuracy on the calibration gas.

Key Features of the GM50A & GM51A Mass Flow Controllers:

• Flow rates ranging from 5 to 50,000 sccm (standard cubic centimeters per minute)
• Metal sealed design with a Teflon valve plug
• Wide choice of digital I/O options, including EtherCAT, DeviceNet?, Profibus?, PROFINET, and RS485, or analog I/O options
• Standard closed conductance leak rate of less than 1.0% of Full Scale

The GM50A and GM51A MFCs cover a broad flow range, allowing precise control from 5 to 50,000 sccm. They feature a metal sealed design with a Teflon valve plug, providing excellent sealing properties for various gases.

To facilitate integration into different control systems, the GM50A and GM51A MFCs offer a wide range of digital I/O options, including EtherCAT, DeviceNet?, Profibus?, PROFINET, and RS485. Analog I/O options are also available. This ensures compatibility with different control architectures and makes it easier to incorporate the MFCs into existing systems.

The MFCs have a standard closed conductance leak rate of less than 1.0% of Full Scale, ensuring accurate and stable flow control.

In summary, the GM50A and GM51A mass flow controllers are digitally-controlled devices that offer precise and responsive flow control in a wide range of applications. With options for analog or digital I/O, a broad flow range, metal sealing with a Teflon valve plug, and low leak rates, they provide accurate and reliable performance for demanding process control requirements.