Multi-gas, Multi-range, Metal-sealed 50 to 100 slm Mass Flow Controller

• The G-Series GM100A mass flow controller offers digital control with either analog (0-5 VDC or 4-20 mA) or digital I/O options, including RS485, Profibus?, EtherCAT?, PROFINET, and DeviceNet?. Utilizing advanced MKS algorithms, it ensures fast and repeatable response times of around 500 milliseconds. Digital calibration provides 1% set point accuracy.

  Features include:
  – Flow rates from 50 to 100 slm
  – Metal sealed with elastomer plug
  – Various digital (EtherCAT, DeviceNet?, Profibus?, PROFINET, RS485) or analog (0-5 VDC, 4-20 mA) I/O options
  – Standard closed conductance leak rate below 1.0% of Full Scale
  – Settling time under 750 milliseconds

  

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