Multi-gas, Multi-range, Elastomer-sealed, 5 – 50,000 sccm Mass Flow Controllers,

The G-Series GE50A mass flow controller offers digital control with RS485, Profibus?, EtherCAT?, PROFINET, or DeviceNet? I/O. Utilizing advanced MKS control algorithms, it ensures fast and repeatable response times of around 500 milliseconds. Digital calibration provides 1% set point accuracy.

Features include:
– Flow rates from 5 to 50,000 sccm
– Seal and valve plug options: Viton, Buna, Neoprene, or Kalrez
– Various digital (EtherCAT, DeviceNet?, Profibus?, PROFINET, RS485) or analog (0-5 VDC, 4-20 mA) I/O options
– Standard closed conductance leak rate below 0.1% of Full Scale
– Settling time under 750 milliseconds