HROIBA SEC-Z700X Series Pressure Insensitive Mass Flow Controller

Pressure Insensitive Mass Flow Controller

The SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function, ensuring consistent flow rate control. By incorporating on-board pressure measurement, it reduces the cost, size, and complexity of gas delivery systems.

Pressure Insensitive
This advanced function simplifies the gas supply system. In typical multi-chamber gas lines, a line regulator, pressure sensor, and filter are utilized to mitigate crosstalk issues in mass flow controllers caused by pressure fluctuations. However, the SEC-Z700X Series maintains high stability and effectively manages gas flow regardless of upstream and downstream pressure variations. It provides accurate flow rate output, temperature, and pressure readings.

High Accuracy ±1.0% S.P.
The mass flow controller utilizes polynomial approximated curve compensation to ensure linearity and achieve high accuracy across all flow control ranges. To improve the accuracy of actual gas measurements, HORIBA STEC’s standard gas measurement system is used to calibrate the controller with various process gases.

High Speed Response
Equipped with the “Variable PID system,” the controller achieves a rapid 1-second response time between any two set points. The Variable PID dynamically adjusts based on the flow point setting, optimizing the PID factor when changing the full-scale flow and gases.

Multi-Gas/Multi-Range Solution
The configuration software allows for quick and easy specification changes without the need to remove the mass flow controller from the gas panel or piping. This feature reduces the requirement for spare mass flow controllers, saving both time and costs.

SPEC PDF

SEC-Z700X_Specifications