HORIBA FS-3000 Thermal Flow Splitter

FS-3000 combines HORIBA STEC’s mass flow controller (MFC) and MuCube (Master controller) to achieve stable splitting control. The proprietary control algorithm implemented in MuCube effectively controls the MFC, ensuring stable flow rate splitting.

The control algorithm regulates flow rate ratios to achieve stable flow rate splitting control, while employing HORIBA STEC’s original control optimization technology to control the upper stream pressure of the FS-3000. Additionally, the control algorithm enables high-speed response to changes in flow rate splitting ratios.

Enhanced Expandability and Maintenance Performance: FS-3000 supports up to 15 flow channels through high-speed signal processing. In the event of MFC failure, only the failed slave unit needs to be replaced, simplifying the repair process.

Flexible Adaptability to Specific Requirements: FS-3000 supports a wide range of gases, including mixed gases. It also offers user interfaces such as RS-485 and DeviceNet for seamless integration with different systems.