The DZ-100 utilizes the same CRITERION? technology, which is a differential pressure detection system designed for laminar viscous flow ranges, as the HORIBA STEC’s D500 mass flow controller. This advanced technology enables precise control of mass flow for various gases. Similar to the D500, the DZ-100 is user-configurable and supports multi-range and multi-gas applications.
The MFC’s compact design reduces the internal volume of the gas flow path, while an optimized control algorithm enhances response characteristics. The MFC module incorporates a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are integrated within the module itself. The power supply components are housed in a separate small control box. By connecting up to four MFC modules using dedicated miniature connectors, they can be controlled simultaneously.
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