HORIBA D700uF Micro Flow Pressure Insensitive Mass Flow Module

D700uF(Micro Flow) is designed for ≤ 5SCCM flow application.??
≤ 5SCCM flow control has been very critical in high aspect ratio process.?
Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM.

• Down to 0.025SCCM flow control capability
  • Precise tuning gas control, enhance process tunability
• ≤ 100ms Step-up Response & MFC-to-MFC deviation control?
  • Deliver high productivity and greater process performance?
• In-House flow metrology
  • Reliable performance from all manufactured products
• State Monitor Function
  • Provide more internal data for smarter failure prediction
• Better Valve Shut-off and Corrosion Resistance by PFA nozzle?
  • Robustness with less particle risk reduce down time and optimize yield