One device. Multiple gases and flows. Maximum flexibility.
Features:
- Programmable multi-gas/multi-range capabilities
- Brooks? MultiFlo? gas database with extensive native gas runs for correction functions
- Sub-1 second flow response time and 1% set point accuracy for demanding applications
- Suitable for a wide variety of gases
- Fast response with Hastelloy sensor
- Easily accessible diagnostic service port independent of tool communication
- Multi-protocol communication options: DeviceNet?, EtherCAT?, Profibus?, and RS-485 analog interface
Benefits:
- MultiFlo? technology allows new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
- Simple and user-friendly MultiFlo? programming enables gas selection in under 60 seconds
- Reduces inventory for OEMs and large end users by consolidating gas and range-specific controllers
- Excellent process gas accuracy supported by superior metrology systems and calibration based on global standards
- Corrosion-resistant sensor ensures unmatched long-term stability, maximizing yield and throughput
- User-accessible service port simplifies troubleshooting and diagnostics
- Cost-effective elastomer seals for flexibility across various applications
- Multi-protocol communication interface supports integration into existing systems
Applications:
- Solar cell chemical vapor deposition systems
- Life sciences bioreactors
- Vacuum processes
- Nanotechnology/MEMS fabrication
- Plasma, glass, and web coating systems
- Ideal for manifold/gas delivery systems
商品評價
目前沒有評價。