BROOKS 5850EMH Series High Temperature Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high temperature applications.Models 5850EMH / 5851EMH

Features:

• Long-term zero stability: <0.2% full scale per year
• Settling time: <3 seconds with negligible overshoot/undershoot
• Wide flow range: 3 sccm to 30,000 slpm
• High pressure rating: up to 1,500 psi
• Optional enhanced internal process finish: 5? inch Ra average
• Removable flow sensor
• Insensitive to mounting attitude
• Mechanical and electrical compatibility with other mass flow controllers
• TTL compatible “valve off” and purge function

Benefits:

• All-metal flow path enhances gas purity and reduces leaks
• Proven long-term stability and accuracy across various processes and applications
• Reliable performance ensures excellent return on investment
• Removable flow sensor eliminates the need for continuous monitoring and gas pressure readjustment
• Easy installation and servicing with analog-only inputs/outputs

Applications:

• Fiber Optic
• LED/MOCVD
• Semiconductor
• Solar