BROOKS 5850EM Series Metal Sealed Thermal Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high pressure applications.Models 5850EM / 5851EM

Features:

• Long-term zero stability of less than 0.2% full scale per year
• Settling time of less than 3 seconds with negligible overshoot/undershoot when commanding changes
• Wide flow range from 3 sccm up to 30,000 slpm
• High pressure rating of up to 1,500 psi
• Optional enhanced internal process finish with a 5? inch Ra average
• Removable flow sensor
• Insensitive to mounting attitude
• Mechanical and electrical compatibility with other mass flow controllers
• TTL compatible “valve off” and purge function

Benefits:

• All-metal flow path enhances gas purity and reduces leaks
• Proven long-term stability and accuracy across a broad range of processes and applications
• Excellent return on investment due to reliable performance
• Removable flow sensor eliminates the need for continuous monitoring and readjustment of gas pressures
• Easy installation and servicing with analog-only inputs/outputs

Applications:

• Fiber Optic
• LED/MOCVD
• Semiconductor
• Solar