HORIBA D700MG High Speed & Precision Pressure Insensitive Mass Flow Module

High Speed & Precision Pressure Insensitive Mass Flow Module

In critical semiconductor manufacturing processes, there is a constant need for precise gas flow control devices that facilitate future innovations and seamless transitions from the laboratory to the fabrication of cutting-edge memory and logic devices. HORIBA introduces the new pressure-based MFC D700MG as an upgraded model of the D500MG, specifically designed to address the challenges faced by customers in this industry.

• On-Tool Gas and Full Scale Configuration Change *Only EtherCAT
  • Provide flexibility to process optimization
• 100ms Step-up Response & MFC-to-MFC deviation control
  • Deliver high productivity and greater process performance
• MRMG functionality for small flow rate(Bin101 – Bin105)
  • Provide flexibility to process requiring small flow rate
• Better Valve Shut-off and Corrosion Resistance by PFA nozzle
  • Robustness with less particle risk reduce down time and optimize yield

• State Monitor Function
  • Provide more internal data for smarter failure prediction

SPEC PDF

D700MG_Specifications_En_B

A5012467_D707MG_14C3