HORIBA CRITERION D500 Pressure Insensitive Mass Flow Module

This?leading-edge pressure insensitive mass flow module is installed with?differential pressure detection and a piezo actuator valve.

CRITERION D500 offers a high level of performance, making it suitable for various advanced semiconductor manufacturing processes. It features pressure insensitivity, multi-range/multi-gas/multi-pressure capabilities, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and an all-metal construction.

Pressure Insensitive Performance
The addition of a high-performance Pressure Insensitive function simplifies the gas supply system.

Multi-range, multi-gas, multi-pressure solution
The new functions allow users to change the gas type, full-scale flow rate, and supply pressure range.

G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function
Operators can conduct their own process health tests, typically in three seconds or less, improving throughput.

High Accuracy
Flow rate accuracy for process gas is enhanced through advanced three-dimensional adjustment.

Fast Response
The controller’s response time is less than 0.8 seconds, ensuring accurate and stable flow control.

Dynamic Range
The wide control range spans from 0.2% F.S. to 100% F.S.

SPEC PDF

CRITERION_D500_Specifications