HORIBA SEC-Z500X Series Multi Range/Multi Gas Digital Mass Flow Controller

This particular model is one of HORIBA’s best-selling digital mass flow controllers. It offers versatile multi-range/multi-gas capabilities, enabling users to conveniently switch the gas type or adjust the full-scale flow rate on-site. With a high accuracy of +/- 1.0% S.P., a piezo actuator valve, rapid response time, and a durable all-metal construction, this mass flow controller is well-suited for enhancing process yield and streamlining parts management. It supports various communication protocols, including digital/analog, DeviceNet?, and EtherCAT?.

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