BROOKS GF120xHT Series Metal Sealed High-Temperature Thermal Mass Flow Controllers & Meters

High-purity flow path. Outstanding performance and reliability for high-temperature applications.

Features:

• Designed for high-temperature applications up to 150°C
• Convenient service port for easy access to diagnostics through a user-friendly interface
• Corrosion-resistant Hastelloy sensor
• Calibrated to the customer’s specific process conditions

Benefits:

• Ability to support applications up to 150°C for the delivery of liquid precursors
• User-friendly diagnostics interface assists process engineers in ensuring the MFC operates within specified limits, maximizing yield and uptime
• Unmatched long-term sensor stability for optimal throughput and yields
• Calibrated at the customer’s operating temperature and pressure for optimal performance

Applications:

• Advanced Strip Processes
• Atomic Layer Deposition (ALD)
• Deposition