GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Raises the standard in performance for value-driven metal sealed applications.

Features:

• Long-term zero stability of less than ±0.5% full scale per year
• Settling times of less than 1 second
• Full-scale flow rates up to 300 slpm
• All-metal seal flow path with a 16? inch Ra surface finish
• Corrosion-resistant Hastelloy? sensor suitable for gases prone to thermal decomposition, operating at lower temperatures
• Programmable MultiFloTM capability allows for thousands of gas types and range combinations without removing the MFC from the gas line, maintaining accuracy
• Best-in-class temperature coefficient specification with active temperature compensation
• Embedded self-test routines and independent diagnostic/service port
• Slimline body with VCR fittings
• DeviceNetTM, Profibus?, RS-485, and analog interfaces

Benefits:

• Fast settling time of less than 1 second reduces wasted gas and process variability
• No elastomer seals that can experience oxygen permeation and require replacement over time
• MultiFloTM simplifies and streamlines the process of changing process gases, eliminating the need to remove and recalibrate MFCs
• Quick and easy configuration of new gases and ranges in under 60 seconds
• Measurement accuracy remains unaffected by temperature variations
• Convenient access to diagnostics port for maximum uptime
• Compact size facilitates integration into tight machine spaces and makes it an excellent choice for retrofits
• Multi-protocol communication interface simplifies integration into existing systems

Applications:

• Cost-efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
• Reduction of MFC inventory in six-inch/eight-inch semiconductor fabs
• MOCVD for LED and power device manufacturing
• Solar/thin film chemical vapor deposition (CVD) systems
• Analytical OEM equipment