GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters
Raises the standard in performance for value-driven metal sealed applications.
Features:
- Long-term zero stability of less than ±0.5% full scale per year
- Settling times of less than 1 second
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path with a 16? inch Ra surface finish
- Corrosion-resistant Hastelloy? sensor suitable for gases prone to thermal decomposition, operating at lower temperatures
- Programmable MultiFloTM capability allows for thousands of gas types and range combinations without removing the MFC from the gas line, maintaining accuracy
- Best-in-class temperature coefficient specification with active temperature compensation
- Embedded self-test routines and independent diagnostic/service port
- Slimline body with VCR fittings
- DeviceNetTM, Profibus?, RS-485, and analog interfaces
Benefits:
- Fast settling time of less than 1 second reduces wasted gas and process variability
- No elastomer seals that can experience oxygen permeation and require replacement over time
- MultiFloTM simplifies and streamlines the process of changing process gases, eliminating the need to remove and recalibrate MFCs
- Quick and easy configuration of new gases and ranges in under 60 seconds
- Measurement accuracy remains unaffected by temperature variations
- Convenient access to diagnostics port for maximum uptime
- Compact size facilitates integration into tight machine spaces and makes it an excellent choice for retrofits
- Multi-protocol communication interface simplifies integration into existing systems
Applications:
- Cost-efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
- Reduction of MFC inventory in six-inch/eight-inch semiconductor fabs
- MOCVD for LED and power device manufacturing
- Solar/thin film chemical vapor deposition (CVD) systems
- Analytical OEM equipment











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