BROOKS 4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Ultra-fast response for time-critical flow processes.Models 4850 / 4860

Features:

• Flow response time (settling time) of less than 0.75 seconds
• Innovative MEMS sensor and proprietary PID algorithm
• Compact size, less than half the size of typical thermal MFCs: 1″ x 3″ x 4″ (25 mm x 76 mm x 101 mm)
• Optional Local Operator Interface (LOI) simplifies set-up and operation, with a free LabVIEW VI download for monitoring and zeroing the device
• Digital capability via RS-232

Benefits:

• Well suited for a wide range of common, non-corrosive gases
• Fast response time ensures rapid steps during process recipe changes
• Excellent for OEMs: Compact size facilitates integration into tight machine spaces and speeds up installation
• Optional Local Operator Interface (LOI) provides a complete solution for local indication, set point control, and device configuration, eliminating the need for remote secondary electronics
• Variety of communication options available for easy alignment with user requirements

Applications:

• Heat treating, cutting/welding, and other thermal processes
• Solar/thin film physical vapor deposition (PVD) systems
• Analytical devices for measuring and controlling reagent, calibration, and sample gas flows