BROOKS GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

One device. Multiple gases and flows. Maximum flexibility.

Features:

• Programmable multi-gas/multi-range capabilities
• Brooks? MultiFlo? gas database with extensive native gas runs for correction functions
• Sub-1 second flow response time and 1% set point accuracy for demanding applications
• Suitable for a wide variety of gases
• Fast response with Hastelloy sensor
• Easily accessible diagnostic service port independent of tool communication
• Multi-protocol communication options: DeviceNet?, EtherCAT?, Profibus?, and RS-485 analog interface

Benefits:

• MultiFlo? technology allows new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
• Simple and user-friendly MultiFlo? programming enables gas selection in under 60 seconds
• Reduces inventory for OEMs and large end users by consolidating gas and range-specific controllers
• Excellent process gas accuracy supported by superior metrology systems and calibration based on global standards
• Corrosion-resistant sensor ensures unmatched long-term stability, maximizing yield and throughput
• User-accessible service port simplifies troubleshooting and diagnostics
• Cost-effective elastomer seals for flexibility across various applications
• Multi-protocol communication interface supports integration into existing systems

Applications:

• Solar cell chemical vapor deposition systems
• Life sciences bioreactors
• Vacuum processes
• Nanotechnology/MEMS fabrication
• Plasma, glass, and web coating systems
• Ideal for manifold/gas delivery systems